Harsh duty processes in the semiconductor production always provide new challenges for vacuum pumps.
半導(dǎo)體生產(chǎn)中的嚴(yán)酷工作過程總是會(huì)向真空泵提出新的挑戰(zhàn)。
Based on the proven technology of the dry multi-stage roots pumps, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology and less.
基于羅茨干式多級(jí)泵的被證實(shí)的技術(shù)，PV以A3H系列提供了泵解決方案，該方案以45 nm及更小的技術(shù)為300mm晶圓配備了不同的泵送速度。
 
A3H dry pumps for harsh duty processes Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps.
用于半導(dǎo)體生產(chǎn)中嚴(yán)苛工作過程的A3H干式泵總是會(huì)向真空泵提出新的挑戰(zhàn)。
 
Based on the proven multi-stage Roots technology, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology nodes and less.
基于羅茨多級(jí)泵的被證實(shí)的技術(shù)，PV以A3H系列提供了泵解決方案，該方案以45 nm及更小的技術(shù)為300mm晶圓配備了不同的泵送速度。
 
Compared to previous process pumps, the gas throughput, particle tolerance and condensation resistance have been increased significantly.
與以往過程泵比較，氣體生產(chǎn)量、粒子容忍度和防冷凝已經(jīng)得到顯著提高。
Their multi-stage Roots technology guarantees a particle-free and dry vacuum.
其羅茨多級(jí)技術(shù)確保提供了無(wú)顆粒的干式泵。
The pumps are equipped with temperature sensors and inert gas flushing.
泵配備有溫度傳感器和惰性氣體沖洗裝置。
The optimal solution for the most demanding processes.
服務(wù)于最為需要的過程的可選解決方案
The dry pumps of the A3H series, through the use of corrosion-resistant materials, are optimal for demanding CVD processes in the semiconductor, photovoltaic or flat panel display production.
A3H系列干式泵，通過使用防腐蝕材料，是半導(dǎo)體、光伏或平板顯示器生產(chǎn)中迫切需要CVD過程的可選解決方案。
The high gas throughput is another characteristic of the series.
高氣體生產(chǎn)量是該系列的另一個(gè)特點(diǎn)。
A low noise emission and a low vibration level distinguish these multi-stage Roots pumps.
They are compliant with CE and Semi S2 standards.
較低噪音釋放和較低振動(dòng)水平使此等羅茨多級(jí)泵與眾不同。
The A3H series for the most demanding processes saves operating costs The usage of these dry pumps supports a decrease in operating costs through low energy consumption.
服務(wù)與最為需要的過程的A3H系列節(jié)省了運(yùn)營(yíng)成本。此等干式泵的使用通過較低能量消耗實(shí)現(xiàn)對(duì)運(yùn)營(yíng)成本降低的支持。
Through the improved particle tolerance and the condensation resistance, the maintenance intervals and the lifetime of the pumps could be extended, which means an additional reduction of operating costs.
通過改進(jìn)的粒子容忍度和防冷凝，維護(hù)間隔和泵的壽命是可以得到延長(zhǎng)的，這意味著又一次運(yùn)營(yíng)成本的減少。
 
Advantages
優(yōu)勢(shì)
Longer maintenance intervals through improved particle tolerance and condensation resistance Optimal efficiency for demanding CVD processes through the use of more corrosion-resistant materials and high gas throughput Reduced operating costs through minimal energy consumption Minimal space needed through compact construction Low noise emission and low vibration level Compliant with CE and Semi S2 standards
通過改進(jìn)的粒子容忍度和防冷凝而實(shí)現(xiàn)的更長(zhǎng)維護(hù)間隔期；通過使用更好防腐蝕材料和高氣體生產(chǎn)量而實(shí)現(xiàn)的服務(wù)于迫切需要的CVD過程的可選效率；通過最小化能量消耗而實(shí)現(xiàn)降低運(yùn)營(yíng)成本；通過緊湊結(jié)構(gòu)設(shè)計(jì)實(shí)現(xiàn)只需最小的空間；低噪音釋放和低振動(dòng)水平；符合CE和Semi S27標(biāo)準(zhǔn)。
 
The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10-2 hPa.
ACP系列羅茨多級(jí)泵的設(shè)計(jì)目的就是為了在壓力范圍為大氣壓力和3 x 10-2 hPa之間的無(wú)油無(wú)粒子應(yīng)用場(chǎng)合的。
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余氣體分析系統(tǒng)、電子顯微鏡或UHV系統(tǒng)的情況下，空氣冷卻泵是旋轉(zhuǎn)葉片泵的最佳替代物。
 
Light duty processes require a clean and dry vacuum.
輕載過程需要一個(gè)清潔和干燥真空環(huán)境。
The multi-stage roots pumps by PV are the ideal solution for industrial applications and Research & Development.
PV羅茨多級(jí)泵是工業(yè)應(yīng)用和研究開發(fā)場(chǎng)合下的理想解決方案。
Dry pumps for light duty processes Based on the proven technology of the dry multi-stage roots pumps, PV offers a wide selection of high power pumps for light duty processes.
服務(wù)與輕載過程的干式泵
基于羅茨干式多級(jí)泵的被證明技術(shù)，PV提供服務(wù)于輕載過程的高能泵的廣泛選擇方案。
The most important characteristics for pumps in these applications are a high pumping speed and robustness as well as high reliability.
此等應(yīng)用中的泵的最重要的特點(diǎn)就是高泵送速度、健壯性和可靠性。
Air-cooled multi-stage roots pumps from the ACP series The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10 -2 hPa.
ACP系列的羅茨空氣冷卻多級(jí)泵
ACP系列的羅茨多級(jí)泵設(shè)計(jì)目的就是為了在壓力范圍為大氣壓力和3 x 10-2 hPa之間的無(wú)油無(wú)粒子應(yīng)用場(chǎng)合的。
 
 
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余氣體分析系統(tǒng)、電子顯微鏡或UHV系統(tǒng)的情況下，空氣冷卻泵是旋轉(zhuǎn)葉片泵的最佳替代物。
 
They are ideal as a roughing pump for turbomolecular pumps.
作為用于低真空泵，它們是用于渦輪分子泵的理想解決方案。
The specially developed G version of the pumps is designed for the transportation of traces of corrosive gases.
經(jīng)過特別開發(fā)的此等泵的G版本的設(shè)計(jì)目的就是為了運(yùn)輸腐蝕性氣體的殘留。
This version of the ACP series is recommended for transfer chambers, process monitoring systems and ion beam applications.
ACP系列版本是推薦用于運(yùn)輸室、過程監(jiān)視系統(tǒng)和離子束應(yīng)用場(chǎng)合的。
The CV version of the air-cooled ACP series has a water vapor capacity of up to 1,000 grams per hour.
空氣冷卻ACP系列的CV版本具有的水蒸汽容量可達(dá)1,000g/h。
It is designed to avoid steam condensation in the pump block.
其設(shè)計(jì)就是為了避免泵體內(nèi)的蒸汽冷凝。
ACP 120 and ACG 600 for industrial applications Based on the tens of thousands of semiconductor process pumps installed worldwide, the ACP 120 provides the advantages of the multi-stage roots pumps in industrial applications as well.
用于工業(yè)應(yīng)用場(chǎng)合的ACP 120和ACG 600
基于安裝于全世界范圍的上萬(wàn)臺(tái)半導(dǎo)體過程泵的應(yīng)用實(shí)踐，ACP 120也具備了工業(yè)應(yīng)用中羅茨多級(jí)泵的優(yōu)點(diǎn)。
The water-cooled pump can be obtained as a standard version for light duty applications as well as a purge gas version for slightly corrosive processes or for pumping down condensable mediums.
水冷卻泵可以作為用于輕載應(yīng)用版本而獲得，也可以作為浪涌氣體版本用于輕微腐蝕性過程的應(yīng)用場(chǎng)合，或者用于泵送可冷凝介質(zhì)的應(yīng)用場(chǎng)合。
The ACP 120 can be combined into different pumping stations with roots pumps.
ACP 120 可以組合進(jìn)帶羅茨泵的不同泵送站。
The roots pumping station ACG 600 may be the basis of a completely lubricant-free pumping system for vacuum solutions in the decorative or tool coating.
羅茨泵送站ACG 600可以是用于裝飾或工具噴涂真空解決方案的一個(gè)完整的免潤(rùn)滑泵送系統(tǒng)的基礎(chǔ)。
The compact dry pump: the A 100 L The compact dry pump A 100 L was developed for the cost-saving integration in semiconductor production systems.
緊湊型干式泵：A100 L
緊湊型干式泵A 100 L的開發(fā)目的就是為了應(yīng)用于半導(dǎo)體生產(chǎn)系統(tǒng)的節(jié)約成本的集成方案。
 
The multi-stage roots pump is suitable for usage in clean rooms and can replace external pumps with a significantly higher pumping speed.
羅茨多級(jí)泵適合于清潔空間應(yīng)用場(chǎng)合，而且能夠以可觀的更高泵送速度替換外部泵。
Through variably adjustable speeds in the standby mode, the power consumption of the compact dry pump A 100 L can be additionally lowered.
通過調(diào)整備用模式中的可調(diào)速度，緊湊型干式泵A 100 L的能量消耗是進(jìn)一步得到降低。
 
Integrated pumps of the A100 series for light duty processes The pumps of the A100 series with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities.
服務(wù)于輕載過程的A100系列的集成泵
具有緊湊結(jié)構(gòu)尺寸的A100系列泵是為半導(dǎo)體工廠中彈性集成而專門開發(fā)。
Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.
設(shè)計(jì)為直接在工具上安裝和快速的泵送，該系列用于輕載應(yīng)用的緊湊型泵是負(fù)載鎖、運(yùn)輸室以及其他非腐蝕性應(yīng)用的完美解決方案。
 
Integrated pumps set standards Since the market integration of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry.
集成泵設(shè)定了有關(guān)標(biāo)準(zhǔn)。鑒于A 100 L泵的市場(chǎng)集成，它們革新了服務(wù)于半導(dǎo)體行業(yè)生產(chǎn)設(shè)施的多泵集成方案。
Based on dry multi-stage Roots technology and despite their small dimensions, the pumps of the A100 series offer high pumping speeds and short pump down times.
基于羅茨干式多級(jí)泵技術(shù)，盡管只有較小尺寸，A 100 系列泵提供了高泵送速度和短泵送時(shí)間。
Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.
今天，集成輕載泵是最先進(jìn)的，A100系列是在全世界范圍許多300 mm半導(dǎo)體晶圓工廠內(nèi)安裝的。
Integrated pumps for load-lock and transfer chambers In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations.
在輕載應(yīng)用場(chǎng)合服務(wù)于負(fù)載鎖和運(yùn)輸室的集成泵清除了泵安裝中的真空線路效應(yīng)的影響。
Installation costs for vacuum lines, integration and commissioning are lowered through the use of the A100 series.
通過使用A100 系列，可以降低真空線路、集成和調(diào)試的安裝成本。
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