Harsh duty processes in the semiconductor production always provide new challenges for vacuum pumps.
半導體生產中的嚴酷工作過程總是會向真空泵提出新的挑戰。
Based on the proven technology of the dry multi-stage roots pumps, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology and less.
基于羅茨干式多級泵的被證實的技術，PV以A3H系列提供了泵解決方案，該方案以45 nm及更小的技術為300mm晶圓配備了不同的泵送速度。
 
A3H dry pumps for harsh duty processes Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps.
用于半導體生產中嚴苛工作過程的A3H干式泵總是會向真空泵提出新的挑戰。
 
Based on the proven multi-stage Roots technology, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology nodes and less.
基于羅茨多級泵的被證實的技術，PV以A3H系列提供了泵解決方案，該方案以45 nm及更小的技術為300mm晶圓配備了不同的泵送速度。
 
Compared to previous process pumps, the gas throughput, particle tolerance and condensation resistance have been increased significantly.
與以往過程泵比較，氣體生產量、粒子容忍度和防冷凝已經得到顯著提高。
Their multi-stage Roots technology guarantees a particle-free and dry vacuum.
其羅茨多級技術確保提供了無顆粒的干式泵。
The pumps are equipped with temperature sensors and inert gas flushing.
泵配備有溫度傳感器和惰性氣體沖洗裝置。
The optimal solution for the most demanding processes.
服務于最為需要的過程的可選解決方案
The dry pumps of the A3H series, through the use of corrosion-resistant materials, are optimal for demanding CVD processes in the semiconductor, photovoltaic or flat panel display production.
A3H系列干式泵，通過使用防腐蝕材料，是半導體、光伏或平板顯示器生產中迫切需要CVD過程的可選解決方案。
The high gas throughput is another characteristic of the series.
高氣體生產量是該系列的另一個特點。
A low noise emission and a low vibration level distinguish these multi-stage Roots pumps.
They are compliant with CE and Semi S2 standards.
較低噪音釋放和較低振動水平使此等羅茨多級泵與眾不同。
The A3H series for the most demanding processes saves operating costs The usage of these dry pumps supports a decrease in operating costs through low energy consumption.
服務與最為需要的過程的A3H系列節省了運營成本。此等干式泵的使用通過較低能量消耗實現對運營成本降低的支持。
Through the improved particle tolerance and the condensation resistance, the maintenance intervals and the lifetime of the pumps could be extended, which means an additional reduction of operating costs.
通過改進的粒子容忍度和防冷凝，維護間隔和泵的壽命是可以得到延長的，這意味著又一次運營成本的減少。
 
Advantages
優勢
Longer maintenance intervals through improved particle tolerance and condensation resistance Optimal efficiency for demanding CVD processes through the use of more corrosion-resistant materials and high gas throughput Reduced operating costs through minimal energy consumption Minimal space needed through compact construction Low noise emission and low vibration level Compliant with CE and Semi S2 standards
通過改進的粒子容忍度和防冷凝而實現的更長維護間隔期；通過使用更好防腐蝕材料和高氣體生產量而實現的服務于迫切需要的CVD過程的可選效率；通過最小化能量消耗而實現降低運營成本；通過緊湊結構設計實現只需最小的空間；低噪音釋放和低振動水平；符合CE和Semi S27標準。
 
The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10-2 hPa.
ACP系列羅茨多級泵的設計目的就是為了在壓力范圍為大氣壓力和3 x 10-2 hPa之間的無油無粒子應用場合的。
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余氣體分析系統、電子顯微鏡或UHV系統的情況下，空氣冷卻泵是旋轉葉片泵的最佳替代物。
 
Light duty processes require a clean and dry vacuum.
輕載過程需要一個清潔和干燥真空環境。
The multi-stage roots pumps by PV are the ideal solution for industrial applications and Research & Development.
PV羅茨多級泵是工業應用和研究開發場合下的理想解決方案。
Dry pumps for light duty processes Based on the proven technology of the dry multi-stage roots pumps, PV offers a wide selection of high power pumps for light duty processes.
服務與輕載過程的干式泵
基于羅茨干式多級泵的被證明技術，PV提供服務于輕載過程的高能泵的廣泛選擇方案。
The most important characteristics for pumps in these applications are a high pumping speed and robustness as well as high reliability.
此等應用中的泵的最重要的特點就是高泵送速度、健壯性和可靠性。
Air-cooled multi-stage roots pumps from the ACP series The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10 -2 hPa.
ACP系列的羅茨空氣冷卻多級泵
ACP系列的羅茨多級泵設計目的就是為了在壓力范圍為大氣壓力和3 x 10-2 hPa之間的無油無粒子應用場合的。
 
 
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余氣體分析系統、電子顯微鏡或UHV系統的情況下，空氣冷卻泵是旋轉葉片泵的最佳替代物。
 
They are ideal as a roughing pump for turbomolecular pumps.
作為用于低真空泵，它們是用于渦輪分子泵的理想解決方案。
The specially developed G version of the pumps is designed for the transportation of traces of corrosive gases.
經過特別開發的此等泵的G版本的設計目的就是為了運輸腐蝕性氣體的殘留。
This version of the ACP series is recommended for transfer chambers, process monitoring systems and ion beam applications.
ACP系列版本是推薦用于運輸室、過程監視系統和離子束應用場合的。
The CV version of the air-cooled ACP series has a water vapor capacity of up to 1,000 grams per hour.
空氣冷卻ACP系列的CV版本具有的水蒸汽容量可達1,000g/h。
It is designed to avoid steam condensation in the pump block.
其設計就是為了避免泵體內的蒸汽冷凝。
ACP 120 and ACG 600 for industrial applications Based on the tens of thousands of semiconductor process pumps installed worldwide, the ACP 120 provides the advantages of the multi-stage roots pumps in industrial applications as well.
用于工業應用場合的ACP 120和ACG 600
基于安裝于全世界范圍的上萬臺半導體過程泵的應用實踐，ACP 120也具備了工業應用中羅茨多級泵的優點。
The water-cooled pump can be obtained as a standard version for light duty applications as well as a purge gas version for slightly corrosive processes or for pumping down condensable mediums.
水冷卻泵可以作為用于輕載應用版本而獲得，也可以作為浪涌氣體版本用于輕微腐蝕性過程的應用場合，或者用于泵送可冷凝介質的應用場合。
The ACP 120 can be combined into different pumping stations with roots pumps.
ACP 120 可以組合進帶羅茨泵的不同泵送站。
The roots pumping station ACG 600 may be the basis of a completely lubricant-free pumping system for vacuum solutions in the decorative or tool coating.
羅茨泵送站ACG 600可以是用于裝飾或工具噴涂真空解決方案的一個完整的免潤滑泵送系統的基礎。
The compact dry pump: the A 100 L The compact dry pump A 100 L was developed for the cost-saving integration in semiconductor production systems.
緊湊型干式泵：A100 L
緊湊型干式泵A 100 L的開發目的就是為了應用于半導體生產系統的節約成本的集成方案。
 
The multi-stage roots pump is suitable for usage in clean rooms and can replace external pumps with a significantly higher pumping speed.
羅茨多級泵適合于清潔空間應用場合，而且能夠以可觀的更高泵送速度替換外部泵。
Through variably adjustable speeds in the standby mode, the power consumption of the compact dry pump A 100 L can be additionally lowered.
通過調整備用模式中的可調速度，緊湊型干式泵A 100 L的能量消耗是進一步得到降低。
 
Integrated pumps of the A100 series for light duty processes The pumps of the A100 series with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities.
服務于輕載過程的A100系列的集成泵
具有緊湊結構尺寸的A100系列泵是為半導體工廠中彈性集成而專門開發。
Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.
設計為直接在工具上安裝和快速的泵送，該系列用于輕載應用的緊湊型泵是負載鎖、運輸室以及其他非腐蝕性應用的完美解決方案。
 
Integrated pumps set standards Since the market integration of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry.
集成泵設定了有關標準。鑒于A 100 L泵的市場集成，它們革新了服務于半導體行業生產設施的多泵集成方案。
Based on dry multi-stage Roots technology and despite their small dimensions, the pumps of the A100 series offer high pumping speeds and short pump down times.
基于羅茨干式多級泵技術，盡管只有較小尺寸，A 100 系列泵提供了高泵送速度和短泵送時間。
Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.
今天，集成輕載泵是最先進的，A100系列是在全世界范圍許多300 mm半導體晶圓工廠內安裝的。
Integrated pumps for load-lock and transfer chambers In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations.
在輕載應用場合服務于負載鎖和運輸室的集成泵清除了泵安裝中的真空線路效應的影響。
Installation costs for vacuum lines, integration and commissioning are lowered through the use of the A100 series.
通過使用A100 系列，可以降低真空線路、集成和調試的安裝成本。
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